Hybrid organic-inorganic micromirror device and method of making a hybrid microdevice

Abstract

A hybrid organic-inorganic micromirror device includes a micromirror comprising an inorganic material positioned above an elastomeric substrate. The micromirror is supported on an underside thereof by a conductive elastomeric support protruding from the elastomeric substrate. The conductive elastomeric support may function as a universal joint and is rendered electrically conductive by an electrically conductive coating thereon. A plurality of electrodes are disposed on the elastomeric substrate under the micromirror. The electrodes are spaced apart from each other and from the micromirror and are arranged around the conductive elastomeric support. Each electrode comprises an inorganic material and is in electrical contact with an elastomeric contact region protruding from the elastomeric substrate. When a voltage bias is applied between the micromirror and one or more of the electrodes, the micromirror is electrostatically actuated to move in a predetermined direction.