The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Mar. 30, 2016
Hitachi High-tech Science Corporation, Minato-ku, Tokyo, JP;
Masafumi Watanabe, Tokyo, JP;
Takehiro Yamaoka, Tokyo, JP;
Hitachi High-Tech Science Corporation, Minato-ku, Tokyo, JP;
Abstract
A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile