The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Oct. 04, 2013
Toray Industries, Inc., Tokyo, JP;
Kunihisa Nagino, Kamakura, JP;
Syunpei Yoshikawa, Kamakura, JP;
Toray Industries, Inc., , JP;
Abstract
A detecting method includes irradiating a substrate having a concave and convex shape, with laser light collected by a lens; and detecting a height difference of the concave and convex shape by acquiring light intensity of reflected light and/or scattered light from the substrate as image data, and a light irradiation surface of the substrate is arranged at a position closer to the lens than a focal position of the lens is, reflected light and/or scattered light from the light irradiation surface is received as detected light, and a height difference of the substrate is detected based on a change in intensity of the received light.