The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2017

Filed:

Sep. 21, 2015
Applicant:

Rion Co., Ltd., Tokyo, JP;

Inventors:

Takashi Minakami, Tokyo, JP;

Masaki Shimmura, Tokyo, JP;

Tomonobu Matsuda, Tokyo, JP;

Assignee:

RION CO., LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 15/14 (2006.01); G01N 21/53 (2006.01); G01N 15/00 (2006.01); G01N 21/03 (2006.01); G01N 21/51 (2006.01);
U.S. Cl.
CPC ...
G01N 21/53 (2013.01); G01N 15/1459 (2013.01); G01N 2015/0053 (2013.01); G01N 2015/1486 (2013.01); G01N 2021/0392 (2013.01); G01N 2021/513 (2013.01);
Abstract

A particle counter for chemical solution in this disclosure uses a flow cell through which a chemical solution including particles flows, a laser light, and a light-receiving element array. Scattered light from the particles passing through a detection region on an optical path of the laser light in the flow cell is condensed to the light-receiving element array. The laser light in the center of the detection region has an energy density of 3×10mW/cmor more. Each of plural light-receiving elements (a) is larger in length and width than a spot diameter of the scattered light, and (b) receives the scattered light from a region with a size of 760 μmor less included in the detection region. The signal processing unit counts the particles passing through the detection region by use of a threshold corresponding to the smallest measurable particle size of 0.03 μm.


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