The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Aug. 18, 2016
Applicant:
Horiba Stec, Co., Ltd., Kyoto, JP;
Inventors:
Daisuke Hayashi, Kyoto, JP;
Yuhei Sakaguchi, Kyoto, JP;
Masakazu Minami, Kyoto, JP;
Atsuko Teraoka, Kyoto, JP;
Assignee:
HORIBA STEC, CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01N 21/05 (2006.01); G01N 21/3504 (2014.01); G01N 21/03 (2006.01);
U.S. Cl.
CPC ...
G01N 21/05 (2013.01); G01N 21/3504 (2013.01); G01N 2021/0389 (2013.01);
Abstract
The present invention intends to provide a CpMg concentration measuring device capable of accurately measuring the concentration of CpMg to be supplied to a process chamber without being affected by spontaneous decomposition, and is adapted to measure light intensity in a predetermined wavelength band around 12.8 μm and on the basis of the light intensity, calculate the concentration of CpMg in a material gas.