The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 21, 2017

Filed:

Nov. 14, 2014
Applicants:

Agency for Science, Technology and Research, Singapore, SG;

Nanyang Technological University, Singapore, SG;

Inventors:

Hong Cai, Singapore, SG;

Jifang Tao, Singapore, SG;

Julius Ming-Lin Tsai, Singapore, SG;

Aiqun Liu, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/24 (2006.01); G01L 11/02 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 11/025 (2013.01); G01L 9/0076 (2013.01);
Abstract

A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphragm, wherein the sensing micro-ring is configured to produce a resonance wavelength shift when the gap is varied, the resonance wavelength shift indicative of the force applied to the diaphragm.


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