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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9822284 B1

PDFFull Text
Date of Patent:
Nov. 21, 2017

Filed:

Aug. 21, 2014

Adhesive film and method for manufacturing semiconductor device

Applicant:

Mitsui Chemicals Tohcello, Inc., Chiyoda-ku, Tokyo, JP;

Inventors:

Shinichi Usugi, Chiba, JP;

Kouji Igarashi, Tokai, JP;

Akimitsu Morimoto, Nagoya, JP;

Assignee:

MITSUI CHEMICALS TOHCELLO, INC., Tokyo, JP;

Attorney:

Buchanan, Ingersoll & Rooney PC

Primary Examiner:

Moazzam Hossain

Assistant Examiner:

Omar Mojaddedi

Int. Cl.
CPC ...
H01L 21/56 (2006.01); H01L 21/67 (2006.01); H01L 23/29 (2006.01); C09J 7/02 (2006.01); C09J 201/00 (2006.01); H01L 23/00 (2006.01); B32B 7/12 (2006.01); B32B 27/06 (2006.01); B32B 27/28 (2006.01); B32B 27/34 (2006.01); B32B 27/36 (2006.01); B32B 3/08 (2006.01); H01L 21/683 (2006.01); B32B 25/12 (2006.01); B32B 25/18 (2006.01); B32B 27/18 (2006.01); B32B 27/08 (2006.01);
U.S. Cl.
CPC ...
C09J 7/0285 (2013.01); B32B 3/085 (2013.01); B32B 7/12 (2013.01); B32B 25/12 (2013.01); B32B 25/18 (2013.01); B32B 27/06 (2013.01); B32B 27/08 (2013.01); B32B 27/18 (2013.01); B32B 27/281 (2013.01); B32B 27/34 (2013.01); B32B 27/36 (2013.01); C09J 7/02 (2013.01); C09J 7/0217 (2013.01); C09J 201/00 (2013.01); H01L 21/565 (2013.01); H01L 21/6835 (2013.01); H01L 24/19 (2013.01); H01L 24/26 (2013.01); H01L 24/96 (2013.01); B32B 2307/306 (2013.01); B32B 2307/736 (2013.01); B32B 2307/748 (2013.01); B32B 2405/00 (2013.01); B32B 2457/00 (2013.01); B32B 2457/14 (2013.01); C09J 2201/134 (2013.01); C09J 2201/606 (2013.01); C09J 2203/326 (2013.01); C09J 2433/00 (2013.01); C09J 2467/006 (2013.01); C09J 2477/006 (2013.01); C09J 2479/086 (2013.01); H01L 21/561 (2013.01); H01L 21/568 (2013.01); H01L 2221/68381 (2013.01); H01L 2224/12105 (2013.01); H01L 2924/15788 (2013.01); H01L 2924/181 (2013.01); H01L 2924/3511 (2013.01);
Abstract

An adhesive film of the present invention includes a base material layer and a self-peeling adhesive layer laminated therein. The base material layer has a thermal contraction percentage in a direction of flow (thermal contraction percentage in an MD direction) and a thermal contraction percentage in an orthogonal direction with respect to the direction of flow (thermal contraction percentage in a TD direction) that satisfy the following conditions: (1) after heating at 150° C. for 30 minutes, 0.4≦|thermal contraction percentage in MD direction/thermal contraction percentage in TD direction|≦2.5 and average of thermal contraction percentage in MD direction and thermal contraction percentage in TD direction≦2%, and (2) after heating at 200° C. for 10 minutes, 0.4≦|thermal contraction percentage in MD direction/thermal contraction percentage in TD direction|≦2.5 and average of thermal contraction percentage in MD direction and thermal contraction percentage in TD direction≧3%.

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