The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2017

Filed:

Dec. 15, 2015
Applicant:

Kabushiki Kaisha Topcon, Tokyo, JP;

Inventors:

Kaoru Kumagai, Tokyo, JP;

Shugo Akiyama, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/35 (2014.01); G01N 21/31 (2006.01); G01J 3/10 (2006.01); G01J 3/42 (2006.01); G01N 21/359 (2014.01); G01N 21/3554 (2014.01); G01J 3/02 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G01N 21/359 (2013.01); G01J 3/0232 (2013.01); G01J 3/10 (2013.01); G01J 3/42 (2013.01); G01N 21/314 (2013.01); G01N 21/3554 (2013.01); G01N 21/4738 (2013.01); G01N 2021/3148 (2013.01); G01N 2021/3155 (2013.01); G01N 2021/3166 (2013.01); G01N 2021/3181 (2013.01); G01N 2021/4769 (2013.01); G01N 2201/0627 (2013.01);
Abstract

A material analytical sensor includes an emitter that irradiates a material with irradiation light including a wavelength region related to estimation of an amount of a component of the material, a controller that controls an irradiation cycle of the irradiation light, a receiver that receives reflected light from the material to output as a pulse signal and receives disturbance light to output as a noise signal, an integrator that samples N pulse signals during a predetermined period and integrates the sampled N pulse signals to obtain a first integrated value, and samples N noise signals during a same period as the predetermined period with a same cycle as the irradiation cycle and integrates the sampled N noise signals to obtain a second integrated value, and an extractor that deducts the second integrated value from the first integrated value to extract an amount of the reflected light.


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