The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2017
Filed:
Dec. 01, 2011
Ki Soo Chang, Daejeon-Si, KR;
Hae Young Choi, Chungcheongbuk-do, KR;
Seon Young Ryu, Chungcheongbuk-do, KR;
Geon Hee Kim, Daejeon-Si, KR;
Sun Cheol Yang, Daejeon-Si, KR;
Ki Soo Chang, Daejeon-Si, KR;
Hae Young Choi, Chungcheongbuk-do, KR;
Seon Young Ryu, Chungcheongbuk-do, KR;
Geon Hee Kim, Daejeon-Si, KR;
Sun Cheol Yang, Daejeon-Si, KR;
Korea Basic Science Institute, Daejeon, KR;
Abstract
The present invention pertains to a device for measuring a temperature distribution, which can measure a temperature distribution without contacting a minor sample having a three-dimensional structure. More particularly, the device for measuring the temperature distribution can measure a three-dimensional temperature distribution for a sample, wherein the temperature distribution in a depth direction (direction z) of the sample is measured by a thermo-reflectance technique using a chromatic dispersion lens, a diffraction spectrometer and an optical detection array; and the temperature distribution in parallel directions (direction x-y axes) of the sample is measured by the thermo-reflectance technique using a biaxial scanning mirror.