The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2017

Filed:

Oct. 13, 2016
Applicants:

Vmicro, Villeneuve d'Ascq, FR;

Centre National DE LA Recherche Scientifique, Paris, FR;

Inventors:

Benjamin Walter, Lille, FR;

Marc Faucher, Lesquin, FR;

Assignees:

VMICRO, Villeneuve d'Ascq, FR;

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0045 (2013.01); B81B 2201/02 (2013.01); B81B 2201/031 (2013.01); B81B 2203/0118 (2013.01);
Abstract

A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.


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