The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Sep. 14, 2012
Leigh F. Sharrock, Londonderry, NH (US);
Tsepa Bayul, Somerville, MA (US);
Christopher J. Dancewicz, Methuen, MA (US);
Wayne A. Lasante, Littleton, MA (US);
Leigh F. Sharrock, Londonderry, NH (US);
Tsepa Bayul, Somerville, MA (US);
Christopher J. Dancewicz, Methuen, MA (US);
Wayne A. Lasante, Littleton, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A substrate loading station including a frame forming a chamber configured to hold a controlled environment, a transfer robot connected to the frame and one or more substrate cassette holding locations each capable of having a substrate cassette holder disposed within the frame. Each of the one or more substrate cassette holding locations being configured to removably support a respective substrate cassette in a predetermined position for communication with the transfer robot to effect substrate transfer between a respective cassette and the transfer robot where the one or more substrate cassette holding locations are configured to effect the interchangeability of one or more substrate cassette holders with other substrate cassette holders for changing a substrate cassette holding capacity of the substrate loading station.