The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Apr. 28, 2014
Applicant:
Evonik Degussa Gmbh, Essen, DE;
Inventors:
Assignee:
Evonik Degussa GmbH, Essen, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 5/00 (2006.01); H01L 21/288 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); C23C 16/46 (2006.01); C23C 16/48 (2006.01); H01L 21/02 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/288 (2013.01); C07F 5/00 (2013.01); C23C 16/407 (2013.01); C23C 16/46 (2013.01); C23C 16/48 (2013.01); C23C 18/1216 (2013.01); C23C 18/14 (2013.01); H01L 21/02381 (2013.01); H01L 21/02488 (2013.01); H01L 21/02565 (2013.01); H01L 21/02623 (2013.01); H01L 21/02628 (2013.01); H01L 21/02664 (2013.01);
Abstract
The present invention relates to liquid formulations which can be produced by dissolving at least one indium alkoxide compound which can be prepared by reacting an indium trihalide InXwhere X=F, Cl, Br, I with a secondary amine of the formula R'NH where R′=alkyl in a molar ratio of from 8:1 to 20:1 to the indium trihalide in the presence of an alcohol of the generic formula ROH where R=alkyl in at least one solvent, a process for producing them, their use for producing indium oxide-containing or (semi)conducting layers and processes for producing indium oxide-containing layers which use the formulation of the invention.