The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2017

Filed:

Mar. 27, 2015
Applicant:

Fine Polymers Corporation, Toyko, JP;

Inventors:

Toshitada Kato, Noda, JP;

Naoya Sato, Noda, JP;

Shigeru Kamon, Noda, JP;

Koichiro Ogata, Noda, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C11D 3/34 (2006.01); C11D 3/20 (2006.01); C11D 3/28 (2006.01); C11D 3/18 (2006.01); C11D 11/00 (2006.01); C09K 13/08 (2006.01); C11D 3/04 (2006.01); H01L 21/311 (2006.01); C11D 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0206 (2013.01); C09K 13/08 (2013.01); C11D 1/02 (2013.01); C11D 3/042 (2013.01); C11D 3/187 (2013.01); C11D 3/2096 (2013.01); C11D 3/28 (2013.01); C11D 3/349 (2013.01); C11D 3/3481 (2013.01); C11D 11/0047 (2013.01); H01L 21/31111 (2013.01);
Abstract

The invention provides an aqueous solution capable of selectively protecting a nitrogen-containing silicon compound from corrosion by a treating solution for etching, cleaning or the like, etching oxygen-containing, carbon-containing silicon in particular, and making a large etch rate difference between a nitrogen-containing silicon compound and an oxygen-containing silicon compound, and a process for producing electronic parts as well. The invention is embodied by a treating solution for electronic parts that is an aqueous solution containing one or two or more of anionic surface active agents represented by the following formulae (1), (2) and (3), and a process for producing an electronic part.


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