The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2017

Filed:

Oct. 10, 2013
Applicants:

Corey Cochrane, Burbank, CA (US);

Patrick M. Lenahan, Boalsburg, PA (US);

Inventors:

Corey Cochrane, Burbank, CA (US);

Patrick M. Lenahan, Boalsburg, PA (US);

Assignee:

The Penn State Research Foundation, University Park, PA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01V 3/00 (2006.01); G01R 33/385 (2006.01); G01N 24/10 (2006.01); G01R 33/24 (2006.01); G01R 33/32 (2006.01);
U.S. Cl.
CPC ...
G01R 33/385 (2013.01); G01N 24/10 (2013.01); G01R 33/24 (2013.01); G01R 33/323 (2013.01);
Abstract

A sensing apparatus for detecting and determining the magnitude of a static magnetic field has a first set of coils capable of producing a sweeping, quasi static, magnetic field when driven by a direct current and a second set of coils, for magnetic field modulation, positioned between the first set of coils capable of producing a low-frequency (audio), oscillating magnetic field when driven by an oscillating current. The magnetic fields induce a current through the semiconductor device which sampled to identify changes as a function of sweeping, quasi static magnetic field. To create an apparatus for detecting and identifying atomic scale defects in fully processed devices, a radio frequency circuit with a resonant component is added which provides an oscillating electromagnetic field in a direction perpendicular to that of the static magnetic field produced by the first set of coils.


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