The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Nov. 29, 2013
Applicant:
Adixen Vacuum Products, Annecy, FR;
Inventors:
Assignee:
ADIXEN VACUUM PRODUCTS, Annecy, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 15/10 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
G01N 15/10 (2013.01); H01L 21/67389 (2013.01); G01N 2015/1062 (2013.01);
Abstract
The present invention relates to a station for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure, said transport carrier comprising a rigid casing () containing an aperture and a removable door () allowing the aperture to be closed, the measuring station comprising: The invention also relates to a method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure.