The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Oct. 31, 2012
Applicant:
Sumco Corporation, Minato-ku, Tokyo, JP;
Inventors:
Assignee:
SUMCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 15/26 (2006.01); G01B 11/24 (2006.01); C30B 15/10 (2006.01); C30B 29/06 (2006.01); C03B 19/09 (2006.01); C30B 15/20 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); C03B 19/095 (2013.01); C30B 15/10 (2013.01); C30B 15/20 (2013.01); C30B 15/26 (2013.01); C30B 29/06 (2013.01); H01L 22/12 (2013.01);
Abstract
A method for measuring a three-dimensional shape of an inner surface of a vitreous silica crucible which enables the measurement of the three-dimensional shape of the inner surface of the crucible without contaminating the inner surface of the crucible, is provided. According to the present invention, a method for measuring a three-dimensional shape of a vitreous silica crucible, including a fogging step to form a fog onto an inner surface of the vitreous silica crucible, a three-dimensional shape measuring step to measure a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light, is provided.