The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Mar. 04, 2013
Illinois Tool Works Inc., Glenview, IL (US);
Anthony Kehoe, Glenview, IL (US);
John Lull, Glenview, IL (US);
Bill Valentine, Glenview, IL (US);
Chris Ellec, Glenview, IL (US);
Illinois Tool Works Inc., Glenview, IL (US);
Abstract
A mass flow controller includes at least one conduit having a fluid inlet and a fluid outlet, the conduit defining a flow path along which the fluid flows. The mass flow controller also includes a modified inlet block having an inlet aperture, an inlet channel, and a reservoir fluidly coupled to the inlet channel and the conduit that enhances flow through the controller and improves rate-of-decay measurements. The mass flow controller includes at least one flow sensor that generates a flow sensor signal that is proportional to the mass flow rate of the fluid through the conduit. The mass flow controller includes a control subsystem coupled to a flow sensor and a valve assembly to control flow through the conduit.