The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Feb. 24, 2016
Applicant:
Seagate Technology Llc, Cupertino, CA (US);
Inventors:
Michael R. Feldbaum, San Jose, CA (US);
Justin Jia-Jen Hwu, Fremont, CA (US);
David S. Kuo, Palo Alto, CA (US);
Gennady Gauzner, San Jose, CA (US);
Kim Yang Lee, Fremont, CA (US);
Li-Ping Wang, Fremont, CA (US);
Assignee:
Seagate Technology LLC, Cupertino, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 4/00 (2006.01); B82Y 40/00 (2011.01); B82Y 10/00 (2011.01); G03F 7/00 (2006.01); G11B 5/855 (2006.01);
U.S. Cl.
CPC ...
C23F 4/00 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01); G11B 5/855 (2013.01); Y10T 428/265 (2015.01);
Abstract
The embodiments disclose a method of fabricating a stack, including replacing a metal layer of a stack imprint structure with an oxide layer, patterning the oxide layer stack using chemical etch processes to transfer the pattern image and cleaning etch residue from the stack imprint structure to substantially prevent contamination of the metal layers.