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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9809490 B1

PDFFull Text
Date of Patent:
Nov. 07, 2017

Filed:

Jun. 21, 2016

Method for producing oxynitride film by atomic layer deposition process

Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Miyuki Nakai, Osaka, JP;

Satoshi Shibata, Osaka, JP;

Assignee:

PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka, JP;

Attorney:

McDermott Will & Emery LLP

Primary Examiner:

Mandy Louie

Int. Cl.
CPC ...
C23C 16/00 (2006.01); C03C 17/22 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01); H01M 10/0525 (2010.01); H01M 10/0562 (2010.01);
U.S. Cl.
CPC ...
C03C 17/22 (2013.01); C23C 16/308 (2013.01); C23C 16/45527 (2013.01); C03C 2217/28 (2013.01); C03C 2218/152 (2013.01); H01M 10/0525 (2013.01); H01M 10/0562 (2013.01);
Abstract

A method for producing an oxynitride film includes: (A) supplying a first precursor containing a network former into a reactor in which a substrate is placed; (B) supplying at least one of an oxygen gas and an ozone gas into the reactor; (C) supplying a second precursor containing at least one of an alkali metal element and an alkaline-earth metal element into the reactor; (D) supplying at least one of a nitrogen gas and an ammonia gas into the reactor; and (E) supplying a purge gas into the reactor.

Find Patent Forward Citations

Nakai, Miyuki. (2017). Method for producing oxynitride film by atomic layer deposition process (U.S. Patent No. 9809490). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9809490

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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