The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Nov. 16, 2015
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); H04R 19/00 (2006.01); H01L 41/09 (2006.01); H04R 7/08 (2006.01); H04R 19/04 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00238 (2013.01); B81B 3/0021 (2013.01); B81B 3/0086 (2013.01); B81B 7/0006 (2013.01); B81C 1/00158 (2013.01); H04R 19/005 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81C 2203/035 (2013.01); B81C 2203/0785 (2013.01); H01L 41/0926 (2013.01); H01L 41/0973 (2013.01); H01L 41/1132 (2013.01); H01L 41/1138 (2013.01); H04R 7/08 (2013.01); H04R 19/04 (2013.01);
Abstract
A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the top membrane and the electrode and the interconnecting structure defines a spacing between the top membrane and the bottom membrane.