The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Jan. 24, 2017
Applicant:
Miramems Sensing Technology Co., Ltd., Suzhou, CN;
Inventors:
Yu-Hao Chien, Taipei, TW;
Li-Tien Tseng, Taoyuan County, TW;
Assignee:
MIRAMEMS SENSING TECHNOLOGY CO., LTD., Suzhou, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 7/02 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0041 (2013.01); B81C 1/00238 (2013.01); B81C 1/00293 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0315 (2013.01); B81B 2207/012 (2013.01); B81B 2207/07 (2013.01); B81B 2207/094 (2013.01); B81C 2201/112 (2013.01); B81C 2203/0172 (2013.01); B81C 2203/0792 (2013.01);
Abstract
A pressure sensor using the MEMS device comprises an airtight ring surrounding a chamber defined by the first substrate and the second substrate. The airtight ring extends from the upper surface of the second substrate to the interface between the first substrate and the second substrate and further breaks out the interface. The pressure sensor utilizes the airtight ring to retain the airtightness of the chamber.