The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9804507 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 31, 2017

Filed:

Oct. 15, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Hayato Hoshino, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/62 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70725 (2013.01); G03F 7/70716 (2013.01); G03F 7/70758 (2013.01); G03F 7/70775 (2013.01);
Abstract

Provided is a stage apparatus that includes a first movable unit; a linear motor that includes a stator coil array arranged over a stroke range in a predetermined direction of the first movable unit and a mover magnet fixed to the first movable unit; a second movable unit that is arranged to face the first movable unit via a space and relatively moves with respect to the first movable unit in the predetermined direction; and a switch unit that forms a closed circuit including coils in the stator coil array and a resistance during operation of a dynamic brake, wherein the resistance value of a first coil located at a center region of the stroke range in the stator coil array is larger than that of a second coil located toward an end side of the stroke range rather than the center region in the stator coil array.


Find Patent Forward Citations

Hoshino, Hayato. (2017). Stage apparatus, lithography apparatus, and article manufacturing method (U.S. Patent No. 9804507). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9804507

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…