The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2017

Filed:

Jan. 07, 2015
Applicant:

Allegro Microsystems, Llc, Worcester, MA (US);

Inventors:

Cyril Dressler, Tullins, FR;

Claude Fermon, Orsay, FR;

Myriam Pannetier-Lecoeur, Bures sur Yvette, FR;

Marie-Claire Cyrille, Sinard, FR;

Paolo Campiglio, Montrouge, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/39 (2006.01); G01R 33/09 (2006.01); G01R 33/00 (2006.01); H01L 43/02 (2006.01); H01L 43/08 (2006.01); H01L 43/10 (2006.01); H01L 43/12 (2006.01); H01F 10/32 (2006.01); H01F 41/30 (2006.01);
U.S. Cl.
CPC ...
G01R 33/09 (2013.01); G01R 33/0052 (2013.01); G01R 33/093 (2013.01); G01R 33/098 (2013.01); G11B 5/39 (2013.01); G11B 5/3903 (2013.01); G11B 5/3906 (2013.01); G11B 5/3909 (2013.01); G11B 5/3929 (2013.01); G11B 5/3932 (2013.01); H01F 10/3263 (2013.01); H01F 10/3272 (2013.01); H01F 41/306 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01); H01L 43/10 (2013.01); H01L 43/12 (2013.01); G11B 2005/3996 (2013.01); Y10T 29/41 (2015.01);
Abstract

A magnetoresistance element can have a substrate; a ferromagnetic seed layer consisting of a binary alloy of NiFe; and a first nonmagnetic spacer layer disposed under and directly adjacent to the ferromagnetic seed layer and proximate to the substrate, wherein the first nonmagnetic spacer layer is comprised of Ta or Ru. A method fabricating of fabricating a magnetoresistance element can include depositing a seed layer structure over a semiconductor substrate, wherein the depositing the seed layer structure includes depositing at least a ferromagnetic seed layer over the substrate. The method further can further include depositing a free layer structure over the seed layer structure, wherein the depositing the ferromagnetic seed layer comprises depositing the ferromagnetic seed layer in the presence of a motion along a predetermined direction and in the presence of a predetermined magnetic field having the same predetermined direction.


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