The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
May. 30, 2014
Applicant:
Scattermaster Llc, Tucson, AZ (US);
Inventors:
Eric Loren Hegstrom, Tucson, AZ (US);
John Clyde Stover, Tucson, AZ (US);
Assignee:
SCATTERMASTER, LLC, Tucson, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G01N 21/474 (2013.01); G01N 21/4738 (2013.01); G01N 21/47 (2013.01); G01N 2021/4711 (2013.01); G01N 2021/4723 (2013.01);
Abstract
A hemispherical scanning optical scatterometer and method for its use for measuring scattered radiation, with a reflected scatter measurement laser, and/or a transmitted scatter measurement laser, an array of optical detectors, a computer controlled system to rotate the array of optical detectors, an electronic system, a computer interface and a computer for processing the signal.