The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 31, 2017

Filed:

Dec. 19, 2014
Applicant:

Invensense, Inc., San Jose, CA (US);

Inventors:

Wesley James Emmanouel Teskey, San Jose, CA (US);

Nim Hak Tea, Cupertino, CA (US);

Assignee:

Invensense, Inc., San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01D 18/00 (2006.01); B81B 7/00 (2006.01); B81C 99/00 (2010.01);
U.S. Cl.
CPC ...
G01D 18/008 (2013.01); B81B 7/0087 (2013.01); B81C 99/003 (2013.01);
Abstract

A device and method for a MEMS device with at least one sensor is disclosed. A thermal element is disposed adjacent the MEMS device to selectively adjust a temperature of the MEMS device. A calibration operation is initiated for the sensor to determine a correction value to be applied to the sensor measurement based on the temperature. The correction value is stored.


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