The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Aug. 09, 2016
Applicant:
Board of Regents, the University of Texas System, Austin, TX (US);
Inventors:
C. Grant Willson, Austin, TX (US);
Tsuyoshi Ogawa, Austin, TX (US);
Michael B Jacobsson, Austin, TX (US);
Assignee:
Board of Regents, The University of Texas System, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/08 (2006.01); G03F 7/00 (2006.01); H01L 21/3105 (2006.01); C09D 163/00 (2006.01); C07D 301/00 (2006.01); C07D 303/12 (2006.01);
U.S. Cl.
CPC ...
C07F 7/0881 (2013.01); C07D 301/00 (2013.01); C07D 303/12 (2013.01); C07F 7/0849 (2013.01); C07F 7/0874 (2013.01); C07F 7/0878 (2013.01); C07F 7/0879 (2013.01); C07F 7/0889 (2013.01); C07F 7/0896 (2013.01); C09D 163/00 (2013.01); G03F 7/0002 (2013.01); H01L 21/31055 (2013.01);
Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithogaphy, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.