The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Aug. 25, 2011
Applicants:
Peter Nicholas Heys, Crewe, GB;
Rajesh Odedra, Victoria, CA;
Sarah Louise Hindley, Liverpool, GB;
Inventors:
Assignee:
Merck Patent GmbH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); B05D 1/00 (2006.01); C07F 17/00 (2006.01); C23C 16/455 (2006.01); C07F 11/00 (2006.01);
U.S. Cl.
CPC ...
B05D 1/60 (2013.01); C07F 11/00 (2013.01); C07F 17/00 (2013.01); C23C 16/405 (2013.01); C23C 16/45525 (2013.01);
Abstract
Molybdenum (IV) amide complexes are disclosed herein corresponding in structure to Formula (I): wherein: L is —NRR; Rand Rare C-C-alkyl or hydrogen; R is C-C-alkyl; and n is zero, 1, 2 or 3. Further, methods of forming MoOfilms by atomic layer deposition (ALD) using Formula (I) complexes and Mo[N(Me)(Et)]are disclosed herein.