The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Apr. 07, 2010
Joep J. M. Bontemps, Groningen, NL;
Jan Jacob Koning, Nijmegen, NL;
Casper Van Der Avoort, Waalre, NL;
Jozef Thomas Martinus Van Beek, Rosmalen, NL;
Joep J. M. Bontemps, Groningen, NL;
Jan Jacob Koning, Nijmegen, NL;
Casper van der Avoort, Waalre, NL;
Jozef Thomas Martinus van Beek, Rosmalen, NL;
NXP B.V., Eindhoven, NL;
Abstract
A bulk-acoustic-mode MEMS resonator has a first portion with a first physical layout, and a layout modification feature. The resonant frequency is a function of the physical layout, which is designed such that the frequency variation is less than 150 ppm for a variation in edge position of the resonator shape edges of 50 nm. This design combines at least two different layout features in such a way that small edge position variations (resulting from uncontrollable process variation) have negligible effect on the resonant frequency.