The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Jan. 18, 2013
Applicant:
Persimmon Technologies, Corp., Wakefield, MA (US);
Inventors:
Assignee:
Persimmon Technologies Corporation, Wakefield, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 5/128 (2006.01); H02K 21/44 (2006.01); H02K 41/03 (2006.01); H02K 5/00 (2006.01); H02K 9/22 (2006.01); H02K 5/22 (2006.01); H02K 3/30 (2006.01); H02K 3/44 (2006.01); H02K 15/12 (2006.01);
U.S. Cl.
CPC ...
H02K 5/128 (2013.01); H02K 5/00 (2013.01); H02K 5/225 (2013.01); H02K 9/22 (2013.01); H02K 21/44 (2013.01); H02K 41/033 (2013.01); H02K 3/30 (2013.01); H02K 3/44 (2013.01); H02K 15/12 (2013.01); Y10S 901/23 (2013.01);
Abstract
A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.