The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

May. 14, 2014
Applicant:

Osram Opto Semiconductors Gmbh, Regensburg, DE;

Inventors:

Christian Schmid, Regensburg, DE;

Julia Grosser, Regensburg, DE;

Richard Floeter, Tegernheim, DE;

Markus Broell, Freising, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/42 (2006.01); H01L 33/44 (2010.01); H01L 33/00 (2010.01); H01L 33/24 (2010.01);
U.S. Cl.
CPC ...
H01L 33/44 (2013.01); H01L 33/0079 (2013.01); H01L 33/24 (2013.01); H01L 2933/0025 (2013.01); H01L 2933/0033 (2013.01);
Abstract

A method for producing an optoelectronic semiconductor chip comprises the following steps: providing a substrate, depositing a sacrificial layer, depositing a functional semiconductor layer sequence, laterally patterning the functional semiconductor layer sequence, and oxidizing the sacrificial layer in a wet thermal oxidation process.


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