The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

Jun. 15, 2016
Applicants:

Seoul National University R&db Foundation, Seoul, KR;

Gachon University of Industry-academic Cooperation Foundation, Seongnam-si, Gyeonggi-do, KR;

Inventors:

Byung-Gook Park, Seoul, KR;

Seongjae Cho, Seoul, KR;

Sungjun Kim, Seoul, KR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); H01L 27/24 (2006.01); G11C 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/2463 (2013.01); G11C 13/004 (2013.01); G11C 13/0007 (2013.01); H01L 27/2409 (2013.01); H01L 27/2472 (2013.01); H01L 45/10 (2013.01); H01L 45/1233 (2013.01); H01L 45/145 (2013.01); H01L 45/147 (2013.01); H01L 45/148 (2013.01); H01L 45/149 (2013.01); H01L 45/1616 (2013.01); G11C 2013/005 (2013.01); G11C 2213/15 (2013.01); G11C 2213/33 (2013.01); G11C 2213/54 (2013.01);
Abstract

A resistive random access memory device is provided with a tunneling insulator layer between a resistance change layer and a bottom electrode. Thus, it is possible: to raise the selection (on/off) ratio by the current of a direct tunneling induced by low voltage in the unselected cell and the current of an F-N tunneling induced by high voltage in the selected cell, to efficiently suppress the leakage current in the read operation, to make a low current operation less μA level by controlling the thickness of the tunneling insulator layer, and to be simultaneously fabricated together with circuit devices by forming the bottom electrodes (word lines) with a semiconductor material.


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