The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

Jun. 10, 2015
Applicant:

Joled Inc., Tokyo, JP;

Inventor:

Yuuki Abe, Tokyo, JP;

Assignee:

JOLED INC., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H05B 33/08 (2006.01); H01L 27/32 (2006.01); G02F 1/1368 (2006.01); G02F 1/1362 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1259 (2013.01); H01L 21/02052 (2013.01); H01L 21/02063 (2013.01); H01L 21/31116 (2013.01); H01L 21/31138 (2013.01); H01L 27/1248 (2013.01); H01L 27/3244 (2013.01); H01L 27/3246 (2013.01); H01L 27/3251 (2013.01); H01L 27/3258 (2013.01); H05B 33/0896 (2013.01); G02F 1/1368 (2013.01); G02F 1/136227 (2013.01); H01L 27/3248 (2013.01); H01L 2227/323 (2013.01);
Abstract

Manufacturing method including forming, over substrate, TFT layer, planarization layer, and display element in this order. Forming of TFT layer involves forming passivation layer to cover TFT layer electrode, such as upper electrode, and to come in contact with planarizing layer. Forming of display element involves forming bottom electrode to come in contact with planarizing layer. TFT layer electrode and bottom electrode are connected by: first forming, in planarizing layer, first contact hole exposing passivation layer at bottom thereof; then forming second contact hole exposing TFT layer electrode at bottom thereof through dry-etching passivation layer exposed at bottom of first contact hole using fluorine-containing gas; then forming liquid repellent film containing fluorine on passivation layer inner surface facing second contact hole; and forming bottom electrode along planarizing layer inner surface and passivation layer inner surface respectively facing first contact hole and second contact hole.


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