The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

Aug. 31, 2016
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventors:

Masahide Nakakuki, Hitachinaka, JP;

Mikio Shimizu, Hitachinaka, JP;

Ryoichi Shinohara, Hitachinaka, JP;

Toshihiro Nakajima, Hitachinaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/66 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 22/26 (2013.01); H01L 21/02694 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01);
Abstract

A monitoring method that can detect a sign of disconnection of a heat generation source is provided. Further, a highly reliable semiconductor device is provided. The monitoring method uses a first control device that samples outputs of a plurality of thermometers at a first frequency (100 Hz sampling in S) and controls a plurality of heat generation sources based on temperature information obtained by sampling, and a second control device that forms information based on temperature information obtained by sampling at the first frequency (100 Hz sampling in S) and pieces of heat-generation-source information obtained by sampling of outputs of the respective heat-generation sources at the first frequency (100 Hz sampling in S). Based on the temperature information obtained by sampling at the first frequency (100 Hz sampling in S) and the pieces of heat-generation-source information obtained by sampling at the first frequency (100 Hz sampling in S), states of the heat generation sources are monitored.


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