The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Jan. 28, 2016
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Makoto Nakazumi, Yamato, JP;
Yasutaka Nishi, Tokyo, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 29/49 (2006.01); C23C 18/12 (2006.01); C01F 7/02 (2006.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02178 (2013.01); C01F 7/02 (2013.01); C23C 18/125 (2013.01); C23C 18/1216 (2013.01); H01L 21/02172 (2013.01); H01L 21/02205 (2013.01); H01L 21/02282 (2013.01); H01L 21/02323 (2013.01); H01L 21/02334 (2013.01); H01L 21/02337 (2013.01); H01L 21/28008 (2013.01); H01L 21/28158 (2013.01); H01L 21/311 (2013.01); H01L 29/4908 (2013.01); H01L 29/517 (2013.01); H01L 29/66477 (2013.01);
Abstract
Provided is a technology for efficiently obtaining a metal oxide film having good adhesiveness. A method of producing a metal oxide film includes: an application step of applying a solution containing an organic metal complex onto a substrate; an ozone exposure step of exposing the resultant coating film to ozone; and a heating step of heating the coating film.