The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

Dec. 06, 2016
Applicant:

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventors:

Masanobu Nakazono, Kyoto, JP;

Hirotaka Yabushita, Kyoto, JP;

Junya Nakai, Kyoto, JP;

Tomoko Katsuda, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/16 (2006.01); H01J 49/00 (2006.01); H01J 49/42 (2006.01);
U.S. Cl.
CPC ...
H01J 49/16 (2013.01); H01J 49/0027 (2013.01); H01J 49/42 (2013.01);
Abstract

In order to attain a main objective of the present invention to provide an ion source capable of efficiently extracting ions, the ion source is configured to include: a conductive tubular body having an ion emitting aperture in a tip surface thereof and a penetration portion in a side wall thereof allowing thermo-electrons to pass through from an outside toward an inside; a mesh surrounding an outer periphery of the penetration portion; and a thermionic emission filament surrounding an outer periphery of the mesh, such that the thermo-electrons emitted from the thermionic emission filament pass through the mesh and reach the inside of the conductive tubular body through the penetration portion.


Find Patent Forward Citations

Loading…