The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Sep. 02, 2014
Applicant:
Zeon Corporation, Tokyo, JP;
Inventor:
Satoshi Abe, Tokyo, JP;
Assignee:
ZEON CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
G03F 7/038 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01);
Abstract
A radiation-sensitive resin composition containing an alicyclic olefin polymer which has an acidic group (A), a sulfonium salt-based photoacid generator (B) which is represented by the following general formula (1), and a cross-linking agent (C) is provided. (In the above general formula (1), R, R, and Rrespectively independently are a Cto Caryl group, Cto Cheterocyclic group, Cto Calkyl group, Cto Calkenyl group, or Cto Calkynyl group, the groups being optionally substituted, and 'a' is an integer of 1 to 5.)