The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

Aug. 27, 2015
Applicant:

Seek Thermal, Inc., Santa Barbara, CA (US);

Inventors:

Andreas Engberg, Santa Barbara, CA (US);

William J. Parrish, San Barbara, CA (US);

Assignee:

Seek Thermal, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/265 (2006.01); G01J 1/08 (2006.01); G01J 5/52 (2006.01); G01R 31/28 (2006.01); G01J 5/02 (2006.01); G01R 31/3185 (2006.01); G01J 5/20 (2006.01); G01J 5/00 (2006.01); G01J 5/06 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2656 (2013.01); G01J 1/08 (2013.01); G01J 5/02 (2013.01); G01J 5/522 (2013.01); G01R 31/2832 (2013.01); G01J 5/20 (2013.01); G01J 2005/0048 (2013.01); G01J 2005/0077 (2013.01); G01J 2005/068 (2013.01); G01R 31/318511 (2013.01);
Abstract

FPAs on a wafer can be tested prior to dicing the wafer into individual dies. A focal plane array (FPA) can comprise an array of photodetectors, such as microbolometers, on a semiconductor substrate or die. FPAs can be manufactured on a wafer to make multiple FPAs on a single wafer that can be later diced or divided into individual FPAs. Prior to dicing the wafer, the FPAs can be tested electrically and radiometrically in bulk to characterize individual FPAs, to identify bad pixels, to identify bad chips, to calibrate individual FPAs, and the like. These test results can be used to determine acceptable FPAs and can be used to provide initial settings for imaging systems with the tested and integrated FPA.


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