The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2017
Filed:
Sep. 07, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Atsushi Hiramoto, Machida, JP;
Atsunori Terasaki, Kawasaki, JP;
Yoshiyuki Fukumoto, Kawasaki, JP;
Ryoji Kanri, Zushi, JP;
Masahiko Kubota, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
There is provided a method for selectively removing a plurality of target objects by using a stripping solution without causing damage to an underlying material, the target objects including a resist used as a mask material for dry etching and a transformed layer and a deposited film formed during the dry etching, the stripping solution including a first composition, a second composition, and a third composition, and the method including continuously changing the composition of the stripping solution from the first composition to the second composition and then from the second composition to the third composition.