The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 24, 2017

Filed:

Apr. 15, 2015
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Chunyan Ji, Beijing, CN;

Tian Yang, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); C23C 14/06 (2006.01); C23C 14/14 (2006.01); C23C 14/34 (2006.01); G01F 1/56 (2006.01); G01J 1/42 (2006.01); H02S 20/00 (2014.01); F24J 2/52 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81C 1/00158 (2013.01); C23C 14/0605 (2013.01); C23C 14/0617 (2013.01); C23C 14/14 (2013.01); C23C 14/34 (2013.01); F24J 2/5203 (2013.01); F24J 2/5258 (2013.01); G01F 1/56 (2013.01); G01J 1/42 (2013.01); H02S 20/00 (2013.01); B81B 2203/0127 (2013.01); B81C 2201/013 (2013.01); B81C 2201/0176 (2013.01); B81C 2201/0181 (2013.01); F24J 2002/5215 (2013.01); F24J 2002/5226 (2013.01); F24J 2002/5284 (2013.01); Y02E 10/47 (2013.01); Y02E 10/50 (2013.01);
Abstract

The present disclosure relates to the field of sensor manufacturing technology, particularly discloses a method for manufacturing a micro-sensor body, comprising the steps of S: applying a wet colloidal material on a substrate to form a colloidal layer, and covering a layer of one-dimensional nanowire film on the surface of the colloidal layer to form a sensor embryo; S: drying the colloidal layer of the sensor embryo to an extent that the colloidal layer cracks into a plurality of colloidal islands, a portion of the one-dimensional nanowire film contracting into a contraction diaphragm adhered to the surface of the colloidal islands while the other portion of the one-dimensional nanowire film being stretched into a connection structure connected between the adjacent contraction diaphragms. By the method for manufacturing a micro-sensor body of the present disclosure, the contraction diaphragms and connection structures formed by stretching the one-dimensional nanowire film are connected stably, which enhances the stability of the sensor devices; and the cracking manner renders it easy to obtain a large-scale of sensor bodies with connection structure arrays in stable suspension.


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