The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 17, 2017

Filed:

Apr. 01, 2016
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;

Inventors:

Wonwoo Choi, Yongin-si, KR;

Seungho Yoon, Yongin-si, KR;

Cheryong Hwang, Yongin-si, KR;

Sangbong Lee, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); B32B 43/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); H01L 21/67092 (2013.01); H01L 21/6838 (2013.01); H01L 51/003 (2013.01); B32B 38/10 (2013.01); B32B 43/006 (2013.01); H01L 2251/5338 (2013.01); Y10T 156/1132 (2015.01); Y10T 156/1168 (2015.01); Y10T 156/1944 (2015.01); Y10T 156/1978 (2015.01);
Abstract

An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.


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