The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Jun. 28, 2013
Applicant:
Heptagon Micro Optics Pte. Ltd., Singapore, SG;
Inventors:
Assignee:
Heptagon Micro Optics Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/683 (2006.01); B32B 37/18 (2006.01); B32B 37/12 (2006.01); B32B 38/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B32B 37/12 (2013.01); B32B 37/18 (2013.01); B32B 38/1858 (2013.01); B32B 2457/00 (2013.01); B32B 2551/00 (2013.01);
Abstract
Techniques are described for holding a wafer or wafer sub-stack to facilitate further processing of the wafer of sub-stack. In some implementations, a wafer or wafer sub-stack is held by a vacuum chuck in a manner that can help reduce bending of the wafer or wafer sub-stack.