The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
May. 31, 2013
Applicant:
Mks Technology, Centennial, WY (US);
Inventors:
Assignee:
MKS TECHNOLOGY, Centennial, WY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/02 (2006.01); G01J 3/06 (2006.01); G01J 3/44 (2006.01); G01N 21/65 (2006.01);
U.S. Cl.
CPC ...
G01J 3/0208 (2013.01); G01J 3/06 (2013.01); G01J 3/44 (2013.01); G01N 21/65 (2013.01); G01J 2003/062 (2013.01); G01J 2003/064 (2013.01);
Abstract
A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.