The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Dec. 08, 2014
Applicant:
Fm Industries, Inc., Fremont, CA (US);
Inventors:
Mahmood Naim, Poughkeepsie, NY (US);
David Hammerich, Fremont, CA (US);
Assignee:
FM Industries, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/12 (2016.01); C04B 35/505 (2006.01); C09K 5/14 (2006.01); C01F 17/00 (2006.01); C23C 4/02 (2006.01); C23C 28/04 (2006.01); C23C 4/11 (2016.01); C04B 35/486 (2006.01);
U.S. Cl.
CPC ...
C23C 4/127 (2013.01); C01F 17/0018 (2013.01); C01F 17/0043 (2013.01); C04B 35/486 (2013.01); C04B 35/505 (2013.01); C09K 5/14 (2013.01); C23C 4/02 (2013.01); C23C 4/11 (2016.01); C23C 28/042 (2013.01); C23C 28/048 (2013.01); C01P 2006/32 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01);
Abstract
A component for a semiconductor processing chamber, the component including a substrate and a coating layer provided on a surface of the substrate, wherein the coating layer includes at least a first coating layer having a thermal emissivity of more than 0.98 to 1, having plasma resistance, and having a color value L in a range of 35 to 40 through a thickness direction thereof.