The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Dec. 16, 2011
Applicant:
Roy Gerald Gordon, Cambridge, MA (US);
Inventor:
Roy Gerald Gordon, Cambridge, MA (US);
Assignee:
President and Fellows of Harvard College, Cambridge, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/316 (2006.01); C09D 7/12 (2006.01); C23C 16/18 (2006.01); C23C 16/34 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
C09D 7/1233 (2013.01); C23C 16/18 (2013.01); C23C 16/34 (2013.01); C23C 16/448 (2013.01);
Abstract
This disclosure relates to terpene solutions of metal precursors used for chemical vapor deposition, atomic layer deposition, spray pyrolysis or misted deposition. The terpenes do not supply impurities such as oxygen or halogens to the material being produced, nor do they etch or corrode them. In spray pyrolysis or misted deposition, small droplets provide uniform coating. Terpenes have high flash points and low flammability, reducing the risk of fires. Terpenes have low toxicity and are biodegradable. They are available in large amounts from renewable, natural plant sources, and are low in cost.