The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2017
Filed:
Mar. 12, 2013
Applicant:
Lawrence Livermore National Security, Llc, Livermore, CA (US);
Inventors:
Selim Elhadj, Livermore, CA (US);
Isaac Louis Bass, Castro Valley, CA (US);
Gabriel Mark Guss, Manteca, CA (US);
Manyalibo J. Matthews, Livermore, CA (US);
Assignee:
Lawrence Livermore National Security, LLC, Livermore, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); B81C 1/00 (2006.01); H05H 1/46 (2006.01); B23K 26/14 (2014.01); B23K 26/361 (2014.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00523 (2013.01); B23K 26/0066 (2013.01); B23K 26/1462 (2015.10); B23K 26/361 (2015.10); H05H 1/46 (2013.01); H01J 37/32449 (2013.01);
Abstract
Techniques for removing material from a substrate are provided. A laser beam is focused at a distance from the surface to be treated. A gas is provided at the focus point. The gas is dissociated using the laser energy to generate gas plasma. The substrate is then brought in contact with the gas plasma to enable material removal.