logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9788464 B1

PDFFull Text
Date of Patent:
Oct. 10, 2017

Filed:

Jun. 12, 2014

Power supply device and vacuum processing apparatus using the same

Applicant:

Canon Anelva Corporation, Asao-ku, Kawasaki-shi, JP;

Inventor:

Kyosuke Sugi, Fuchu, JP;

Assignee:

CANON ANELVA CORPORATION, Kawasaki-Shi, Kanagawa-Ken, JP;

Attorney:

Buchanan Ingersoll & Rooney PC

Primary Examiner:

Karla Moore

Assistant Examiner:

Tiffany Nuckols

Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/50 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H05K 7/20 (2006.01); H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05K 7/2089 (2013.01); H01J 37/32715 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 21/68764 (2013.01); H01L 21/68792 (2013.01); H05K 7/20009 (2013.01);
Abstract

A power supply device supplies power to a substrate holder having a plurality of electrodes. The device includes a first fixed conductive member, a second fixed conductive member, a fixed insulating member fixed to an insulating housing portion and configured to insulate the first fixed conductive member from the second fixed conductive member, a first rotation conductive member, a second rotation conductive member, a rotation insulating member fixed to an insulating column portion and configured to insulate the first rotation conductive member from the second rotation conductive member, a first power supply member configured to supply a first voltage to the substrate holder via the first rotation conductive member and the first fixed conductive member, and a second power supply member configured to supply a second voltage to the substrate holder via the second rotation conductive member and the second fixed conductive member.

Find Patent Forward Citations

Sugi, Kyosuke. (2017). Power supply device and vacuum processing apparatus using the same (U.S. Patent No. 9788464). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9788464

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…