The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Jun. 05, 2014
Applicants:
Anders Persson, Uppsala, SE;
Greger Thornell, Uppsala, SE;
Martin Berglund, Uppsala, SE;
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/04 (2006.01); G01R 27/32 (2006.01); G01N 27/62 (2006.01); H05H 1/24 (2006.01); G01N 27/02 (2006.01); H01J 37/32 (2006.01); H05H 1/46 (2006.01); H05H 1/48 (2006.01);
U.S. Cl.
CPC ...
G01N 27/628 (2013.01); G01N 27/02 (2013.01); H01J 37/32935 (2013.01); H05H 1/2406 (2013.01); H05H 1/46 (2013.01); H05H 2001/2418 (2013.01); H05H 2001/4645 (2013.01); H05H 2001/481 (2013.01);
Abstract
A miniaturized plasma source includes a stripline split-ring resonator. The split-ring resonator is sandwiched between two dielectric substrates and two metal ground planes. In order to make the plasma accessible from the outside of the ground planes, a hole is made through the gap between the ends of the split ring. The two ground planes act as an electromagnetic shield, protecting the split-ring resonator from electromagnetic interference due to changes in the electric or dielectric environment surrounding it. The miniaturized plasma source is particularly useful in optogalvanic spectroscopy applications.