The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Apr. 17, 2015
Applicant:
Horiba, Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Kazuhiro Miyamura, Kyoto, JP;
Koji Ueda, Kyoto, JP;
Assignee:
HORIBA, Ltd., Kyoto-shi, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/26 (2006.01); G01N 27/30 (2006.01);
U.S. Cl.
CPC ...
G01N 27/301 (2013.01);
Abstract
A measuring electrode for chemical liquid in semiconductor process that measures a chemical liquid used for a semiconductor process comprises a first body having a first internal liquid chamber into which a first internal liquid is filled, and a flow tube for a part or all of which a responsive glass is used and that forms a flow channel where a chemical liquid as being a measuring object flows, wherein the flow tube is so arranged to penetrate the first body and the responsive glass makes contact with the first internal liquid in the first internal liquid chamber.