The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Jul. 08, 2015
Applicants:
Gachon University of Industry—academic Cooperation Foundation, Seongnam-Si, Gyeonggi-Do, KR;
Gil Medical Center, Incheon, KR;
Inventors:
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/02 (2006.01); C23C 26/00 (2006.01); G01N 33/53 (2006.01); B05B 7/26 (2006.01); B05D 5/00 (2006.01); B81C 1/00 (2006.01); B81C 99/00 (2010.01); C03C 17/28 (2006.01); C12N 15/10 (2006.01); C03C 17/30 (2006.01); B01J 19/00 (2006.01); C23C 14/12 (2006.01); B01L 3/00 (2006.01);
U.S. Cl.
CPC ...
C23C 26/00 (2013.01); B01J 19/00 (2013.01); B05B 7/26 (2013.01); B05D 5/00 (2013.01); B81C 1/00007 (2013.01); B81C 99/0025 (2013.01); C03C 17/28 (2013.01); C03C 17/30 (2013.01); C12N 15/1093 (2013.01); C23C 14/12 (2013.01); G01N 33/53 (2013.01); B01L 3/502707 (2013.01); C03C 2217/20 (2013.01); C03C 2218/15 (2013.01); C03C 2218/31 (2013.01);
Abstract
A method of manufacturing a microarray substrate having improved reliability and mass-production properties uses a vapor of a surface-reforming material, and includes washing a base substrate, supplying the vapor of the surface-reforming material into a container to which the base substrate is provided, and coupling the vapor of the surface-reforming material to a surface of the base substrate to form a self-assembled monolayer.