The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Mar. 13, 2014
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Georg Bischopink, Pliezhausen, DE;
Christoph Schelling, Stuttgart, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 37/02 (2006.01); G01J 5/04 (2006.01); G01J 5/02 (2006.01); G01J 5/34 (2006.01); G01J 5/08 (2006.01); H01L 31/0224 (2006.01); H01L 31/09 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 37/02 (2013.01); G01J 5/024 (2013.01); G01J 5/0225 (2013.01); G01J 5/045 (2013.01); G01J 5/0853 (2013.01); G01J 5/34 (2013.01); H01L 31/0224 (2013.01); H01L 31/09 (2013.01); H01L 31/18 (2013.01); G01J 2005/345 (2013.01);
Abstract
A micromechanical sensor device and a corresponding production method include a substrate that has a front and a rear and a plurality of pillars that are formed on the front of the substrate. On each pillar, a respective sensor element is formed, which has a greater lateral extent than the associated pillar. A cavity is provided laterally to the pillars beneath the sensor elements. The sensor elements are laterally spaced apart from each other by respective separating troughs and make electrical contact with a respective associated rear contact via the respective associated pillar.